This volume provides a critical assessment of the current state-of-the-art in nanomechanics, with particular application to mechanical properties and structural integrity associated with MEMS, NEMS, nanomanufacturing, microelectronics, nanotechnology, biotechnology, and microsystems. It contains articles by leading international experts in these fields. A special workshop summary identifies major gaps in present knowledge, barriers to applications, and critical research areas for rapid development of enabling technologies. This book is an excellent reference book for both academic and industrial researchers working in the fields of nanotechnology, biotechnology, engineering, nanotribology and mechanics, materials science and engineering, computer science, and information technology. It will also be of interest to those pursuing research in NEMS, MEMS, mesomanufacturing, sensors, actuators, controllers, micromotors, and other microsystems in aerospace, defense, and military systems.